UW Research

Washington Nanofabrication Facility (WNF)



The Washington Nanofabrication Facility (WNF) is a shared user facility that provides open access to leading-edge and traditional micro and nanofabrication processing equipment.


WNF operates 15,000 square feet of ISO class 5-7 cleanroom and laboratory space on the University of Washington Campus, providing access to both academic and industry researchers. Users are active in a wide range of applications and research areas ranging from Micro Electro-Mechanical Systems (MEMS), to quantum computing, to biosensors, and more.

Type: Service/Facility/Equipment

Full suite of fabrication tools for processing of wafers and irregularly shaped samples. Trained users can have direct access to WNF tools and processes to fabricate their own devices, or, alternatively, WNF staff can run individual processes or device process flows for those who prefer remote work.  WNF staff have years of experience in fabrication, design, and product development across a range of applicable fields.

Keywords: General

Cleanroom, fabrication, MEMS, microfluidics, photonics, sensors, nanofabrication

Keywords: Specific

Lithography, etch, deposition, thermal processing, metrology, dicing, wafer thinning and polishing, back-end processing, PVD, CVD, ALD, PECVD, RIE, ICP, DRIE