UW Research

UW NNCI Washington Nanofabrication Facility

VISIT CENTER

Purpose

Nanofabrication

Description

Nano/microfabrication and packaging equipment and services for academic and industrial researchers.

Type: Service/Facility/Equipment

Engineering/Design Services, Class 100 Cleanroom Facility, Fabrication – lithography, e-beam lithography, metrology, SEM, PVD sputtering and evaporators, DRIE, RIE, ICP etchers, CVD furnaces, PECVD, ALD, ECD, dicing, grinding, CMP, wirebonding, flip-chip assembly

Keywords: General

Fabrication, Characterization

Keywords: Specific

PVD, CVD, Lithography, ALD, PECVD, RIE, ICP, DRIE