M E 498
Lecture and/or laboratory. Maximum of 6 credits may be applied toward an undergraduate degree.
ME498-I Mechanics of Thin Films, 3-credits, Autumn 2011 Class instructor: Prof. Junlan Wang, Office: MEB208, Email: email@example.com
Thin films and coatings play important roles in many technological applications such as nano and microelectromechanical systems (NEMS/MEMS), magnetic storage media, surface coatings for gas turbine engine and aerospace structures, as well as various energy harvesting and conversion systems. Although the principal function of the thin films in these applications may not be structural, and consequently the load carrying capacity of the thin films may not be the major factor for design and material selection, the fabrication of thin film configuration often results in internal stress in the film of a magnitude sufficient to induce mechanical deformation, damage or failure, which may eventually affect their functional (e.g., electrical or magnetic) properties in the fabricated devices. This course aims to provide an overview of the thin film deposition processes, the stress and microstructure development during film growth, the mechanisms of adhesion, delamination and fracture, and the state-of-the-art characterization techniques for the microstructure and mechanical properties for thin films and nanomaterials. Students will get hands on experience through performing a self-selected thin film fabrication and characterization project.
Student learning goals
Knowledge of thin film deposition processes
Fundamental mechanisms of thin film growth and microstructure development
Controlling mechanisms of thin film adhesion, delamination and fracture
State-of-the-art experimental techniques for thin film deposition, microstructural and mechanical characterization
General method of instruction
Multimedia presentation + students discussion + lab demonstration+hands on project
ME354 or general knowledge of mechanics of materials.
Class assignments and grading
Homework (3-4 biweekly assignment), midterm (1) and project
Homework (40%), midterm (30%), project (30%)