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Instructor Class Description

Time Schedule:

Junlan Wang
M E 498
Seattle Campus

Special Topics in Mechanical Engineering

Lecture and/or laboratory. Maximum of 6 credits may be applied toward an undergraduate degree.

Class description

ME498-I Mechanics of Thin Films, 3-credits, Autumn 2011 Class instructor: Prof. Junlan Wang, Office: MEB208, Email:

Thin films and coatings play important roles in many technological applications such as nano and microelectromechanical systems (NEMS/MEMS), magnetic storage media, surface coatings for gas turbine engine and aerospace structures, as well as various energy harvesting and conversion systems. Although the principal function of the thin films in these applications may not be structural, and consequently the load carrying capacity of the thin films may not be the major factor for design and material selection, the fabrication of thin film configuration often results in internal stress in the film of a magnitude sufficient to induce mechanical deformation, damage or failure, which may eventually affect their functional (e.g., electrical or magnetic) properties in the fabricated devices. This course aims to provide an overview of the thin film deposition processes, the stress and microstructure development during film growth, the mechanisms of adhesion, delamination and fracture, and the state-of-the-art characterization techniques for the microstructure and mechanical properties for thin films and nanomaterials. Students will get hands on experience through performing a self-selected thin film fabrication and characterization project.

Student learning goals

Knowledge of thin film deposition processes

Fundamental mechanisms of thin film growth and microstructure development

Controlling mechanisms of thin film adhesion, delamination and fracture

State-of-the-art experimental techniques for thin film deposition, microstructural and mechanical characterization

General method of instruction

Multimedia presentation + students discussion + lab demonstration+hands on project

Recommended preparation

ME354 or general knowledge of mechanics of materials.

Class assignments and grading

Homework (3-4 biweekly assignment), midterm (1) and project

Homework (40%), midterm (30%), project (30%)

The information above is intended to be helpful in choosing courses. Because the instructor may further develop his/her plans for this course, its characteristics are subject to change without notice. In most cases, the official course syllabus will be distributed on the first day of class.
Last Update by Junlan Wang
Date: 09/20/2011